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Available equipments at constant temperature and humidity room (1st floor of Research Building, Department of Mechanical Engineering)

You can see overviews of the equipments by clicking each topic.

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  • Scanning Probe Microscope SPA300 / SPI3700(SII Nanotechnology Inc.)
  • SPA300

    Scan range: 20 µm × 20 µm (in standard mode)
    Resolution: ~ 4-5 nm
    Sample size: Φ15 mm
    Types of SPM: AFM / DFM
    Optional scanner: 150 µm × 150 µm
    SII Nanotechnology Inc.

  • 3D Profile Measuring Microscope VK-9500 GII(Keyence Corporation)
  • VK-9500

    Principle: Confocal method
    Light source: Halogen lamp (Violet laser 408 nm)
    Zoom ratio: x200~x18000
    Sample size: Φ318 mm, Height 28 mm
    Lateral resolution: 0.01 µm
    Transverse resolution: 0.01 µm
    Camera resolution 1024×768 pixels
    KEYENCE CORPORATION

  • SPM Caliber(Veeco Instruments Inc.)
  • Caliber

    Scan range: XY 90 µm(Closed-loop), Z 10 µm
    Types of SPM: Tapping-AFM Phase imaging
           Contact-AFM Force modulation
    Sample size: Φ50 mm, Less than thick of 5 mm(When using standard scanner)

    • Optical sensor to control the probe is assembled with the scanner. Please get ready appropriate base in advance if you want to measure samples more than thick of 5 mm.

    Veeco Instruments

  • (Under maintenance)Low Vacuum SEM JSM-6460LV(JEOL Ltd.)
  • SEM

    Accelerating voltage: 0.3 kV~30 kV
    Resolution: 3.0 nm (@ 30 kV), 4.0 nm (@ 30 kV, low vacuum mode, Low vacuum ressure: 1~270 Pa)
    Image mode: Secondary-electron image
    (Compositional image, Topographic image, 3D image)
    Sample size: Φ 200 mm, Height 80 mm
    JOEL Ltd.

  • Surface Profiler NewView100(Zygo Corporation)▼
  • NewView100

    Principle: Scanning White-Light interferometry Methodbsevation method: Real-time video monitoring
    Size of CCD: 320×240 pixels
    Lateral resolution: 0.1 nm
    Transverse resolution: 0.46 ~ 4.87 µm (Depending on the objective lens)
    Maximum step height: 100 µm
    Zygo Corporation

  • Fizeau interferometer GPI XP(Zygo Corporation)
  • GPI XP

    Principle: Phase-Shifting Interferometry Method
    Camera resolution: 320 × 240 pixels
    Light source:  He-Ne laser (Wavelength: 632.8 nm)
    Zygo Corporation

  • (Under maintenance) On-machine measurement instrument
    / Ultra-Precision Aspheric Turing Machine (Toshiba Machine Co.,Ltd)
  • turnning

    Control axes: 4 (X,Y,Z and C)
    Positioning resolution: X,Y,Z: 1 nm, C: 0.0001°
    Area of vacuum chuck surface: Φ100 mm
    TOSHIBA MACHINE CO.,LTD

Please contact following address if you wmat to use above equipments.

6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miygi, 980-8579, JAPAN
Research Building 423 (4th floor)
Research Center for Precision Nanosystems Department of Nanomechanics
Nano-Metrology and Control Laboratory (Gao & Arai Laboratory)

TEL: 022-795- 6952

(Assistant Professor: Yoshikazu Arai)

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